362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021W, VO, 2.0h, 3.0EC
TUWEL

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Hybrid

Learning outcomes

After successful completion of the course, students are able to...

to name all major manufacturing processes of micro- & nano-structuring and to explain the principles. The students learn to compare different production processes and to weigh the pros and cons critically. This LVA gives students the understanding to develop process sequences for the complete production of components of microelectronics, photonics and microsystems technology by combining the learned manufacturing processes independently.

Subject of course

Comprehensive knowledge of the processes and technologies that form the basis for modern nanoelectronics, nanophotonics and microsystems technology. Elemental and compound semiconductor of group IV and III-V and oxide ceramics are the focus on the material side.

Process technologies for the manufacture of micro- and nano-scale, 1-, 2- and 3-dimensional structures, components and devices. Primary concerns are the key processes including layer structure with photo- and electron beam lithography and etching techniques with RF plasma processes, selective growth processes for (quasi-) 1-, 2- dimensional structures such as nanodots and nanowires, and in-situ and ex-situ Characterization methods.

Teaching methods

Lecture supported with ppt slides and blackboard drawings
Narratives from the practice of industrial production
Case examples for application
Joint development of process sequences (process integration) for the production of a microelectronic or micromechanical device

Mode of examination

Oral

Additional information

2021 the lecture will be held as ONLINE-Lecture (ZOOM).

30. Nov 2021 – Ulrich Schmid

Thema: Prozesstechnologien / AVT
Uhrzeit: 30.Nov..2021 01:00 PM Amsterdam, Berlin, Rom, Stockholm, Wien  

Zoom-Meeting beitreten
https://tuwien.zoom.us/j/98780017166?pwd=WUFyY2xQVjhURWdXZ0FKdWUwcHI2UT09  

Meeting-ID: 987 8001 7166
Passwort: wQ26ztt2



 

 
07. Dez 2021 – Ulrich Schmid & Heinz Wanzenboeck (Prozessintegration) 
14. Dez 2021 – Borislav Hinkov (Gottfried Strasser)
21. Dez 2021 – Weihnachtsferien (18. Dez 2021- 07. Jan 2022)
11. Jan 2022 – Borislav Hinkov (Gottfried Strasser)
18. Jan 2022 –  Borislav Hinkov (Gottfried Strasser)
25. Jan 2022 –  Borislav Hinkov (Gottfried Strasser)

 

 

 

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Presence lectures in old pre-COVID days were given:
13:00 - 15:00

Besprechungraum ISAS (CB0102)
Gebäudeteil Favoritenstrasse - 2. Stock

         
         

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Tue15:00 - 17:0012.10.2021 https://tuwien.zoom.us/j/96575198092?pwd=aEMwZ3hkeFNPc1hyTUx6NC9JVmtsQT09Additional Lecture Processing technology
Tue13:00 - 15:0009.11.2021 - 25.01.2022 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik - Single appointments
DayDateTimeLocationDescription
Tue12.10.202115:00 - 17:00 https://tuwien.zoom.us/j/96575198092?pwd=aEMwZ3hkeFNPc1hyTUx6NC9JVmtsQT09Additional Lecture Processing technology
Tue09.11.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue16.11.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue23.11.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue30.11.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue07.12.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue14.12.202113:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue11.01.202213:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue18.01.202213:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies
Tue25.01.202213:00 - 15:00 https://tuwien.zoom.us/j/92102495674?pwd=WkVqbDI4Q1pqREZjdXFERVBMVmZWZz09 for part U. Schmid362.144: Processing technologies

Examination modalities


Oral exam

The examination of the full lecture content can be taken at each of the lecturers - registration with the chosen examiner.

Examiner Wanzenböck:
Registration for given dates via TISS
Additional dates available on request at any time -

Examiner Ulrich Schmid:
Dates by individual agreement

Examiner Gottfried Strasser:
Dates by individual agreement

Exams

DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Mon15:00 - 16:0006.12.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral08.11.2021 12:00 - 05.12.2021 12:00TISSMo 06.12.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Tue15:00 - 16:0021.12.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral23.11.2021 12:00 - 20.12.2021 12:00TISSDi 21.12.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0010.01.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral13.12.2021 12:00 - 09.01.2022 12:00TISSMo 10.01.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0031.01.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral03.12.2021 12:00 - 30.01.2022 12:00TISSMo 31.01.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Wed15:00 - 16:0016.02.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral19.01.2022 12:00 - 15.02.2022 12:00TISSMi 16.02.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0028.02.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral31.01.2022 12:00 - 27.02.2022 12:00TISSMo 28.02.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik

Course registration

Begin End Deregistration end
03.09.2021 09:00 04.11.2021 12:00

Curricula

Literature

No lecture notes are available.

Accompanying courses

Continuative courses

Language

if required in English