362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2018W, VO, 2.0h, 3.0EC

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture

Aim of course

Knowledge on key processes and technologies for the fabrication of modern Structures, Components and Devices for Nanoelectronics, Photonics and Microsystems.

Subject of course

Comprehensive knowledge of the processes and technologies that form the basis for modern nanoelectronics, nanophotonics and microsystems technology. Elemental and compound semiconductor of group IV and III-V and oxide ceramics are the focus on the material side.

Process technologies for the manufacture of micro- and nano-scale, 1-, 2- and 3-dimensional structures, components and devices. Primary concerns are the key processes including layer structure with photo- and electron beam lithography and etching techniques with RF plasma processes, selective growth processes for (quasi-) 1-, 2- dimensional structures such as nanodots and nanowires, and in-situ and ex-situ Characterization methods.

Additional information

From 09. Okt 2018 the lecture will take place at

13:00 - 15:00
Meeting room ISAS (CB0102),
Building Wing CB Favoritenstrasse - 1. Stock

         

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Tue13:00 - 15:0002.10.2018 - 29.01.2019 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue13:00 - 15:0001.10.2019 - 28.01.2020Seminarraum 362 - 1 362.144
Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik - Single appointments
DayDateTimeLocationDescription
Tue02.10.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue09.10.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue16.10.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue23.10.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue30.10.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue06.11.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue13.11.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue20.11.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue27.11.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue04.12.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue11.12.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue18.12.201813:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue08.01.201913:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue15.01.201913:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue22.01.201913:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue29.01.201913:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies

Examination modalities

Oral exam

Each lecturer can be chosen as examiner for the full lecture content- Register with the selected Examiner.

Examiner Wanzenboeck:
Registration for stated dates via TISS.
Additional exam dates maybe arranged upon request -
Contact alexandra.linster@tuwien.ac.at

Course registration

Begin End Deregistration end
31.08.2018 09:00 01.11.2018 12:00

Curricula

Literature

No lecture notes are available.

Accompanying courses

Continuative courses

Language

if required in English