Familiarization with selected semiconductor technology processes and measurement techniques for the characterization of semiconductor structures down to the nanometer range.
Procedure:
First there will be a 6-week lecture block in which you will learn the necessary basics, followed by a test. Then a full-day laboratory exercise in groups of 3 is carried out. There are currently 3 different experiments available. You can freely choose your favourite experiment, but the motto is "first come, first served".
Processes in semiconductor technology (lithography, structuring, metallization, etc.)
Characterization measurements on semiconductor structures and devices .
Spatially resolved measurements in the nanometer range (AFM, STM)
Electrical characterization of electronic and optoelectronic components.
There's a test on the lecture block. The actual laboratory exercise can only be done after passing the test !
A laboratory protocol must be prepared.
Use Group Registration to register.
Die Vorlesungsunterlagen (Skriptum, Handouts der Folien) weden kurzfristig zur Verfügung gestellt.
Completed courses in "Halbleiterphysik" and "Technische Elektronik" are strongly recommended.
