362.136 Selected Topics - Microelectronic Devices Lab-course
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019S, VU, 4.0h, 5.0EC

Properties

  • Semester hours: 4.0
  • Credits: 5.0
  • Type: VU Lecture and Exercise

Aim of course

Familiarization with selected semiconductor technology processes and measurement techniques for the characterization of semiconductor structures down to the nanometer range.

 

Procedure:

First there will be a 6-week lecture block in which you will learn the necessary basics, followed by a test. Then a full-day laboratory exercise in groups of 3 is carried out. There are currently 3 different experiments available. You can freely choose your favourite experiment, but the motto is "first come, first served".

 

Subject of course

 

Processes in semiconductor technology (lithography, structuring, metallization, etc.)

Characterization measurements on semiconductor structures and devices .

Spatially resolved measurements in the nanometer range (AFM, STM)

Electrical characterization of electronic and optoelectronic components.

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Mon15:00 - 16:3001.04.2019 - 24.06.2019Seminarraum 362 - 1 Fachvertiefung VL
Selected Topics - Microelectronic Devices Lab-course - Single appointments
DayDateTimeLocationDescription
Mon01.04.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon08.04.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon29.04.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon06.05.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon13.05.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon20.05.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon27.05.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon03.06.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon17.06.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL
Mon24.06.201915:00 - 16:30Seminarraum 362 - 1 Fachvertiefung VL

Examination modalities

There's a test on the lecture block. The actual laboratory exercise can only be done after passing the test !

A laboratory protocol must be prepared.

Course registration

Use Group Registration to register.

Group Registration

GroupRegistration FromTo
Gruppe 401.03.2019 00:0014.05.2019 00:00
Gruppe 811.03.2019 00:00
Gruppe 911.03.2019 00:00
Gruppe f 115.05.2019 00:00
Gruppe f 215.05.2019 00:00
Gruppe f 315.05.2019 00:00
Gruppe f 415.05.2019 00:00
Gruppe f 515.05.2019 00:00
Gruppe t 115.05.2019 00:00

Curricula

Literature

Die Vorlesungsunterlagen (Skriptum, Handouts der Folien) weden kurzfristig zur Verfügung gestellt.

Previous knowledge

Completed courses in "Halbleiterphysik" and "Technische Elektronik" are strongly recommended.

Miscellaneous

  • Attendance Required!

Language

German