Advanced understanding and experience in semiconductor technology.
In an introductory series of lectures the basics of the MOSFET, the processing steps, the operation of semiconductor equipment, and the role of simulation are reviewed. In the main part MOSFETs are fabricated in the cleanroom using the equipment of the institute. The electrical characteristics of the final device are taken with a wafer prober. Process and device simulation is performed using industry-standard TCAD tools.
Different program in the winter and summer term! Winter term: nanotechnology. Summer term: MOSFET.
You can take this class also in the winter term. In the winter term we discuss nanotechnology with emphasis on research topics at our institute. You can also take this class in both terms and get another grade in "Technologie und Werkstoffe, Vertiefung 2".
