After successful completion of the course, students are able to...

- describe the basic semiconductor fabrication processes and process modules applied in modern semiconductor circuit fabrication.

- explain integration schemes for the fabrication of integrated circuits in CMOS-, bipolar- and semiconductor power device technologies.

- follow up-to-date developments in semiconductor micro- and nanoelectronics fabrication and scaling technology.

*** Information regarding the COVID-19 limitations in the semester WS 2020/21 can be found below under "Methods". ***

This lecture is dedicated to students who are interested in an introduction to the technology of modern integrated semiconductor circuits and to those that want to deepen their knowledge in this subject. To reach this goal the scientific fields of semiconductor physics, semiconductor device engineering as well as semiconductor device and circuit fabrication are closely interlinked with each other. In the course, the main up-to-date semicondutor fabrication processes are presented and described in detailed. The lecture´s particular focus is on basic "unit processes," their integration into "process modules" as well as in the field of "process integration". Examples on modern integration schemes are given for CMOS-, bipolar- and power electronic circuit technologies. The contents of the lecture are complemented with concrete examples of semiconductor industry. 

Lecture and discussions, given the COVID-19 pandemic, the lecture will be given online in the semester WS2020/21

* A Lectre book will be available from October 15. in the Institute´s secretary office

* The lecture´s presentation material will be uploaded to TUWEL

The exercises comprise an independent literature study on modern semiconductor integration methods and presentation of the research.The grade of the exercises will acount for 25% of the final grade.

Oral exam, evaluation of literature research and presentation

Please register to get a link to the TUWEL teaching materials and to the Zoom lectures

Basic understanding of semiconductor electron devices e.g. (362.072)