After successful completion of the course, students are able to ...
to understand the basic methods of semiconductor fabrication and / or analysis techniques for semiconductor devices.
through own experimental activities to grasp the principle of the techniques. to carry out microelectronics experiments after previous training
For physicists and chemists, this lab course offers the opportunity to gain practical experience in the cleanroom technology of microfabrication.
Laboratory work on structuring and characterization techniques in semiconductor manufacturing
Work program of the group WEBER
One focus of the group is new reconfigurable devices with programmable functionality, such as a transistor structure with multiple gate electrodes, di, depending on the wiring of the control electrodes, can operate as a transistor, AND logic or inverter, etc., details can be found here:
https://www.tuwien.at/etit/fke/forschung/nanoelektronische-bauelemente/rekonfigurierbare-elektronik
The laboratory schedule is based on the current needs of the ongoing research, and ranges from (delicate) characterization measurements with state of the art equipment to clean room activities. You can find out what can be done in detail during the internship by email from masiar.sistani@tuwien.ac.at.
Work program of the Group LUGSTEIN : on request
Work program of the group WANZENBOECK
Processing techniques of research-related areas (optional):
x) optical lithography and PVD metal deposition for cell culture microchip *
x) direct writing of metal structures (Local CVD with a focused electron beam) *
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures *
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.)
x) other topics available on request
Basic practical knowledge in semiconductor technology
Duration: 3-day internship (other times available on request)
Start: by individual appointment (also possible during the holidays)
Group: max. 3 students
Grade: based on a laboratory report
