362.084 Semiconductor Technology Labcourse
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019S, UE, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise

Aim of course

Practical introduction in basics of semiconductor technology

Duration:    3-day lab course (other time schedule possible upon request)
Start date:  on individual appointment (also during holiday is possible)
Group:       max. 3 students
Grades:      based on lab reports

This hands-on lab course will give students the possibility to experience semiconductor fabrication and/or analysis techniques. This lab course is ideal to deepen the understanding of theoretical know-how gained in 362.144, 362.152, or 362.146.

Also ideal introductory course for physicists and chemists to gain first practical experience in clean-room techniques of microfabrication. (For the interested also extended project works 362.092 are offered).




Subject of course

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group LUGSTEIN

on request

Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional):
x) optical lithography and PVD metal deposition for cell culture microchip *
x) direct writing of metal structures (Local CVD with a focused electron beam) *
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures *
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.)
x) other topics available on request

Additional information



Examination modalities

Lab report

Course registration

Begin End Deregistration end
01.03.2019 06:00 24.06.2019 22:00 30.06.2019 22:00

Registration modalities:

Registration for this course (ideally as groupe) per email to:

alois.lugstein@tuwien.ac.at             or 


Registration email with Header "Anmeldung 362.084 Labor Mikroelektronik"
+ you names, your student IDs, suggesteed start dafe



No lecture notes are available.

Previous knowledge

Recommended in combination with
362.144  VO Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
362.152 VU Materialien, Prozesse und Technologien der Mikroelektronik
362.146 VU Prozesschemie für Mikro- und Nanoelektronik

Preceding courses

Accompanying courses

Continuative courses


  • Attendance Required!


if required in English