Because of an network error, the TISS - Hotline is not reachable. We are working to fix this. Thanks for your understanding!

362.084 Semiconductor Technology Labcourse
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2018W, UE, 2.0h, 3.0EC

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise

Aim of course

Basic know-how of semiconductor technology

Duration:    3-day lab course (other time schedule possible upon request)
Start date:  on individual appointment (also during holiday is possible)
Group:       max. 3 students
Grades:      based on lab reports

This hands-on lab course will give students the possibility to experience semiconductor fabrication and/or analysis techniques. This lab course is ideal to deepen the understanding of theoretical know-how gained in 362.144, 362.152, or 362.146.

Rem: Also ideal introductory course for physicists and chemists to gain first practical experience in clean-room techniques of microfabrication. (For the interested also extended project works 362.092 are offered)

Subject of course

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group LUGSTEIN
on request

Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional):
x) optical lithography and PVD metal deposition for cell culture microchip *
x) direct writing of metal structures (Local CVD with a focused electron beam) *
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures *
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.)
x) other topics available on request

 

Additional information

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Mon14:00 - 14:3001.10.2018Besprechungsraum 362 - 2 Lab exercise - Wanzenboeck - INFO MEETING

Examination modalities

Lab protocol

Group dates

GroupDayTimeDateLocationDescription
Gruppe A (Wanzenboeck)11:00 - 19:0017.01.2019 - 18.01.2019 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 UE Semiconductor Technology Labcourse - Gruppe A (Wanzenboeck)
Gruppe B (Lugstein)09:00 - 17:0011.02.2019 - 12.02.2019 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 UE Semiconductor Technology Labcourse - Gruppe B (Lugstein)
Gruppe C (Wanzenboeck)09:00 - 17:0013.02.2019 - 14.02.2019 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 Semiconductor Technology Labcourse Gruppe C (Wanzenboeck)
Gruppe D (Lugstein)09:00 - 17:0018.02.2019 - 19.02.2019 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 Semiconductor Technology Labcourse - Group D (Lugstein)

Course registration

Begin End Deregistration end
20.09.2018 09:00 31.01.2019 21:00

Registration modalities:

Institut für Festkörperelektronik, Floragasse 7 - 1 Stock, Seminarraum 1 Ort: Vorbesprechung

Group Registration

GroupRegistration FromTo
Gruppe A (Wanzenboeck)20.09.2018 09:0031.01.2019 22:00
Gruppe B (Lugstein)20.09.2018 09:0031.01.2019 22:00
Gruppe C (Wanzenboeck)01.01.2019 22:0031.01.2019 22:00
Gruppe D (Lugstein)01.01.2019 22:0031.01.2019 22:00

Curricula

Literature

No lecture notes are available.

Previous knowledge

Lecture process technology 362.144 recommended.

Accompanying courses

Continuative courses

Miscellaneous

  • Attendance Required!

Language

German