Basic know-how of semiconductor technology

Duration:    3-day lab course (other time schedule possible upon request)
Start date:  on individual appointment (also during holiday is possible)
Group:       max. 3 students
Grades:      based on lab reports

This hands-on lab course will give students the possibility to experience semiconductor fabrication and/or analysis techniques. This lab course is ideal to deepen the understanding of theoretical know-how gained in 362.144, 362.152, or 362.146.

Rem: Also ideal introductory course for physicists and chemists to gain first practical experience in clean-room techniques of microfabrication. (For the interested also extended project works 362.092 are offered)

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group LUGSTEIN
on request

Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional):
x) optical lithography and PVD metal deposition for cell culture microchip *
x) direct writing of metal structures (Local CVD with a focused electron beam) *
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures *
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.)
x) other topics available on request

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

Lab protocol

Lecture process technology 362.144 recommended.