After successful completion of the course, students are able to ...

... carry out experimental research work on semiconductor materials / processes / devices under supervision
... to understand selected manufacturing methods for semiconductor devices and to apply them experimentally.
... to understand selected analysis methods for semiconductor devices and to evaluate experimental data.
... combine the applied methods and develop them independently.
... to understand requirements for diploma theses in the field of semiconductor technology
... to make a qualified decision to continue working on the research topic underway as part of a Master's thesis

In this internship, students will be introduced to the key technologies of modern silicon technology. After a safety training, the trainees are introduced to work under clean room conditions and get to know the handling of media and machines of silicon technology. In addition, they acquire the necessary basic knowledge to characterize materials of semiconductor technology and the electrical characterization of electronic components on the chip or wafer level. The completion of the work is an internship work, which has a self-contained theme to the goal in which the acquired knowledge can be used.
methods

D personal 1: 1 conversations, independent study of literature, 1: 1 device training, independent experimental work, writing a scientific report

Intensive laboratory exercise - partly in the clean room / parallel with assistants - ideal preparation for a further diploma thesis

intirinsic, oral

 

Stanley Wolf, Silicon Processing for the VLSI Era, Vol. I, Process Technology, 1990, Lattice Sunset Beach, Ca, ISBN 0-961672-4-5 Stanley Wolf, Silicon Processing for the VLSI era, Vol. II, Process Integration, 1986, Lattice Sunset Beach, Ca, ISBN 0-961672-3-7 S.M. Sze, VLSI Technology, 1993, Mc Graw Hill Book D. Widmann, H. Mader, H. Friedrich, Technologie hochintegrierter Schaltungen, 1996, Springer