After successful completion of the course, students are able to summarise various Si-processing techniques, to work under clean room conditions, to use media and equipments for Si-technology, to categorise materials of semiconductor technology, to characterise electronic components on the level of chip and wafers as well as to apply the acquired knowledge on a laboratory work.

 

Various Si-processing techniques like focussed ion beam techniques, CVD etc. 

 

 

Introduction to Si-technology; Working under clean room conditions; Briefing to media and equipments of Si-technology

 

Aufwendiges Labor / parallel mit Assistenten

Grading is based on the laboratory work and the corresponding report

 

 

 

Stanley Wolf, Silicon Processing for the VLSI Era, Vol. I, Process Technology, 1990, Lattice Sunset Beach, Ca, ISBN 0-961672-4-5 Stanley Wolf, Silicon Processing for the VLSI era, Vol. II, Process Integration, 1986, Lattice Sunset Beach, Ca, ISBN 0-961672-3-7 S.M. Sze, VLSI Technology, 1993, Mc Graw Hill Book D. Widmann, H. Mader, H. Friedrich, Technologie hochintegrierter Schaltungen, 1996, Springer