362.060 Labcourse on silicon technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2018W, PR, 8.0h, 8.0EC

Properties

  • Semester hours: 8.0
  • Credits: 8.0
  • Type: PR Project

Aim of course

Labcourse : Silicon technology basics

Subject of course

Various Si-processing techniques like focussed ion beam techniques, CVD etc.

Additional information

Aufwendiges Labor / parallel mit Assistenten

Lecturers

Institute

Course registration

Not necessary

Curricula

Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
710 FW Elective Courses - Electrical Engineering Elective

Literature

Stanley Wolf, Silicon Processing for the VLSI Era, Vol. I, Process Technology, 1990, Lattice Sunset Beach, Ca, ISBN 0-961672-4-5 Stanley Wolf, Silicon Processing for the VLSI era, Vol. II, Process Integration, 1986, Lattice Sunset Beach, Ca, ISBN 0-961672-3-7 S.M. Sze, VLSI Technology, 1993, Mc Graw Hill Book D. Widmann, H. Mader, H. Friedrich, Technologie hochintegrierter Schaltungen, 1996, Springer

Language

German