308.892 Surface Technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019W, LU, 2.0h, 2.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 2.0
  • Type: LU Laboratory Exercise

Learning outcomes

After successful completion of the course, students are able to...

perform independently basic synthesis and characterization methods in the field of surface technology. Especially, for the deposition techniques, a strong focus is on PVD based methods.

Subject of course

Overview on the basic PVD based deposition techniques and thin film related characterization methods

  • Vacuum technology
  • Deposition system and their concepts
  • Basic methods for mechanical characterization techniques
  • Thermal treatments and analysis methods
  • Structural and chemical analysis methods and their principals
  • Surface sensitive analysis methods

All presented methods should be carried out and learned by the students themselves in the lab under the supervision of the lectors.

Teaching methods

  • PVD based deposition methods (e.g. DC or DC pulse magnetron sputtering)
  • Nanoindentation
  • Differential scanning calorimetry (DSC) and thermo-gravimetric analysis (TGA
  • X-Ray diffraction & Scanning electron microscopy + EDX analysis
  • Optical profilometry

Mode of examination





Course dates

Wed16:00 - 17:0016.10.2019Seminarraum BD 03 prelimenary meeting
Wed08:30 - 12:0013.11.2019Seminarraum BD 02C Group - Surface sensitive analysis methods
Wed08:30 - 12:0020.11.2019Sem.R. DC rot 07 Group - Vacuum technology & Deposition techniques
Thu14:00 - 16:0021.11.2019Sem.R. DC rot 07 Group - Structural and chemical analysis methods and their principals
Wed08:30 - 12:0027.11.2019Sem.R. DB gelb 03 Group - Basic methods for mechanical characterization techniques
Mon13:00 - 17:0002.12.2019Seminarraum BD 02C Group presentations
Wed08:30 - 12:3008.01.2020Seminarraum BE 01 laboratory tutorial
Tue14:00 - 18:0014.01.2020Seminarraum BA 10B Laboratory tutorial
Course is held blocked

Examination modalities

The course assessment will be based on a protocoll/presentation about the carried out methods.

Course registration

Begin End Deregistration end
22.08.2019 10:00 14.10.2019 23:00 15.10.2019 15:00


Study CodeSemesterPrecon.Info
700 FW Elective Courses - Mechanical Engineering 7. SemesterSTEOP
Course requires the completion of the introductory and orientation phase


No lecture notes are available.

Previous knowledge

Surface technology

Basic materials science

Preceding courses


  • Attendance Required!