Understanding of the principles of a broad range of electron beam based techniques for the study of solids. They have a high scientific and industrial impact of relevance for semiconductor physics, nanotechnology, materials sciences and chemistry. The lecture provides insight into surface and bulk analysis which important for the growing field of nanomachining and nanoproduction.
The interaction of energetic electrons with matter is treated on a fundamental level. Principles of the most important analytical techniques are discussed and illustrated by means of applications.
Lecture notes can be ownloaded during summer term only.
The lecture starts on March, 10th, 2015, 2.15 pm, SEM 134A
oral
Not necessary
