134.172 Particle Solid Interactions
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020W, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Hybrid

Learning outcomes

After successful completion of the course, students are able to descripe and model interactions of ion beams with solids.

In this course effects in the area of ion-solid interaction will be discussed and their mathematical description will be elaborated in detail. The contents of the lectures will be put into context of modern semi-conductor manufacturing techniques, ion beam therapy, surface processing and many more areas of applications. After successful completion of the course, in-depth knowledge of ion beam methods will enable the students to analyze problems, desing solutions and solve complex tasks.

Subject of course

Introduction into the field of particle solid interactions:

  • sputtering
  • ion implantation
  • ion energy loss
  • computer simulation (Monte-Carlo methods and Molecular Dynamics)
  • Applications: production of thin films, material coating, ion implantation, surface analysis.

Teaching methods

Lecture notes will be provided. Phenomena will be discussed and their modelling will be derived in the course. This includes qualitative models as well as quantitative mathematical descriptions. 

Mode of examination


Additional information

The lecture will be held exclusively online. Please ignore the room information here in TISS.



Meeting-ID: 974 5528 8716
Passwort: vo134172



Course dates

Tue10:00 - 12:0013.10.2020 - 26.01.2021Sem.R. DB gelb 05 A 134.172 VO Ionen-Festkörper-Wechselwirkungen
Particle Solid Interactions - Single appointments
No records found.

Examination modalities

oral examination

Course registration

Begin End Deregistration end
17.09.2020 09:00


Study CodeObligationSemesterPrecon.Info
066 461 Technical Physics Mandatory elective
066 461 Technical Physics Mandatory elective


Lecture notes for this course are available. They can be downloaded after registration in TISS.

Previous knowledge