After successful completion of the course, students are able to analyze experimental and theoretical problems in the field of ion-solid interactions, to design solutions and finally to solve the problems.

Introduction into the field of particle solid interactions: sputtering, ion implantation, atomic collision processes; computer simulation (Monte-Carlo methods and Molecular Dynamics). Applications: production of thin films, material coating, ion implantation, surface analysis.

Introduction to the basics of interaction of ions with solid surfaces in lectures on selected chapters.

oral examination

Lecture notes for this course are available. They can be downloaded after registration in TISS.