After successful completion of the course, students are able to descripe and model interactions of ion beams with solids.
In this course effects in the area of ion-solid interaction will be discussed and their mathematical description will be elaborated in detail. The contents of the lectures will be put into context of modern semi-conductor manufacturing techniques, ion beam therapy, surface processing and many more areas of applications. After successful completion of the course, in-depth knowledge of ion beam methods will enable the students to analyze problems, desing solutions and solve complex tasks.