After a positive completion of this course, the students ...

• ... can explain the different types of electron microscopes (SEM, TEM, STEM), as well as their operating principles and fields of application.
• ... are able to describe the functional pronciple of magnetic lenses and their aberrations.
• ... can give an overview about the manyfold applications of modern electron microscopy in Life- and Materials Sciences.

With respect to the lecture notes (in German language) the structure of the lecture is as follows:

1. Introduction (history of electron microscopy, explaination of various types of electron microscopes)
2. Electron optics (properties of an image, geometric optics of a sammellens, aberrations, resolution limits, aberration correction)
3. Scanning electron microscopy (construction, electron penetration in matter, imaging methods, environmental SEM, EBIC, 3D-SEM)
4. Transmission electron microscopy (contruction, electron sources, lens systems, detectors, sample preparation)
5. Imaging methods in TEM (electron diffraction, bright field, dark field, konematic diffraction theory, dynamic diffraction theory, phase contrast, HRTEM, Lorentz-microscopy, holography, tomography)
6. Simulation of HRTEM images (modeling of the specimen, exit wave, reconstruction methods)
7. scanning transmission electron microscopy (functional principles, detectors, imaging methods, differential phase contrast)
8. In-situ electron microscopy (in SEM, in TEM)
9. low-voltage electron microscopy (beam damage, mean free path length, SEM, TEM)
10. analytical electron microscopy (applications, inelastic electron-matter interactions, EELS, EDX, CL)

Vorlesung in deutscher Sprache (bei Bedarf auch in englischer Sprache).

oral

Lecture notes for this course are available for 15 EUR. The lecture notes are further used for the  LVA 138.103 Techniken der analytischen Elektronenmikroskopie.

Solid State Physics