133.293 Electron Microscopy: Principles & Fundamentals
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2019S, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture

Aim of course

After a positive completion of this course, the students ...

  • ... can explain the different types of electron microscopes (SEM, TEM, STEM), as well as their operating principles and fields of application.
  • ... are able to describe the functional pronciple of magnetic lenses and their aberrations.
  • ... can give an overview about the manyfold applications of modern electron microscopy in Life- and Materials Sciences.

Subject of course

With respect to the lecture notes (in German language) the structure of the lecture is as follows:

  1. Introduction (history of electron microscopy, explaination of various types of electron microscopes)
  2. Electron optics (properties of an image, geometric optics of a sammellens, aberrations, resolution limits, aberration correction)
  3. Scanning electron microscopy (construction, electron penetration in matter, imaging methods, environmental SEM, EBIC, 3D-SEM)
  4. Transmission electron microscopy (contruction, electron sources, lens systems, detectors, sample preparation)
  5. Imaging methods in TEM (electron diffraction, bright field, dark field, konematic diffraction theory, dynamic diffraction theory, phase contrast, HRTEM, Lorentz-microscopy, holography, tomography)
  6. Simulation of HRTEM images (modeling of the specimen, exit wave, reconstruction methods)
  7. scanning transmission electron microscopy (functional principles, detectors, imaging methods, differential phase contrast)
  8. In-situ electron microscopy (in SEM, in TEM)
  9. low-voltage electron microscopy (beam damage, mean free path length, SEM, TEM)
  10. analytical electron microscopy (applications, inelastic electron-matter interactions, EELS, EDX, CL)

Additional information

Vorlesung in deutscher Sprache (bei Bedarf auch in englischer Sprache).



Course dates

Tue12:00 - 13:0005.03.2019FH Hörsaal 6 Institutsvorbesprechung
Mon14:00 - 15:3011.03.2019 - 24.06.2019Sem.R. DB gelb 07 Vorlesung
Electron Microscopy: Principles & Fundamentals - Single appointments
Tue05.03.201912:00 - 13:00FH Hörsaal 6 Institutsvorbesprechung
Mon11.03.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesungsbeginn
Mon18.03.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon25.03.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon01.04.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon08.04.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon29.04.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon06.05.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon13.05.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon20.05.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon27.05.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon03.06.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon17.06.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung
Mon24.06.201914:00 - 15:30Sem.R. DB gelb 07 Vorlesung

Examination modalities


Course registration

Not necessary



Lecture notes for this course are available for 15 EUR. The lecture notes are further used for the  LVA 138.103 Techniken der analytischen Elektronenmikroskopie.

Previous knowledge

Solid State Physics

Accompanying courses

Continuative courses



if required in English